Editorial - Special issue on micro- and nano-patterning

被引：0
|
作者：
Detz, Hermann [1 ,2 ]
Wanzenboeck, Heinz D. [3 ]
机构：
[1] Austrian Acad Sci, Vienna, Austria
[2] TU Wien, Ctr Micro & Nanostruct, Floragasse 7, A-1040 Vienna, Austria
[3] TU Wien, Inst Solid State Elect, Floragasse 7, A-1040 Vienna, Austria
来源：
MICROELECTRONIC ENGINEERING | 2017年 / 177卷
关键词：
D O I：
10.1016/j.mee.2017.04.029
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：A1 / A1
页数：1
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