Effects of CdCl2 treatment on the properties of CdS films prepared by r.f. magnetron sputtering

被引:59
|
作者
Lee, Jae-Hyeong
Lee, Dong-Jin
机构
[1] School of Electronic and Information, Kunsan National University
关键词
cadmium sulfide (CdS); heat treatment; cadmium chloride (CdCl2); solar cell;
D O I
10.1016/j.tsf.2006.12.069
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Effects of the thickness of CdCl2 layer and the annealing on structural and optical properties of sputter-deposited US films were investigated. The annealing process of evaporated CdCl2 was carried out by heating the sample in air at 350-500 degrees C for 20 min. As the thickness of the CdCl2 increases, the (002) peak of CdS becomes weak and the other peaks of CdS increases. Especially, for 200 nm CdCl2 the preferential orientation of the (002) plane disappears and the c-axis of the CdS film tends to orient parallel to the substrate. As the CdCl2 layer is thicker, the grains are enlarged significantly. The improvement of optical properties of CdS films with thicker CdCl2 layer might be successfully employed in achieving better conversion efficiencies in solar cells. (C) 2007 Elsevier B.V All rights reserved.
引用
收藏
页码:6055 / 6059
页数:5
相关论文
共 50 条
  • [41] Composite SiOx/fluorocarbon plasma polymer films prepared by r.f. magnetron sputtering of SiO2 and PTFE
    Pihosh, Y.
    Biederman, H.
    Slavinska, D.
    Kousal, J.
    Choukourov, A.
    Trchova, M.
    Mackova, A.
    Boldyryeva, A.
    VACUUM, 2006, 81 (01) : 38 - 44
  • [42] Effect on silicon nitride thin films properties at various pressure of R.F. magnetron sputtering
    Majeed, Uzair
    Mustafa, Mohd. Kamarulzaki
    Nayan, Nafarizal
    MALAYSIAN JOURNAL OF FUNDAMENTAL AND APPLIED SCIENCES, 2015, 11 (02): : 52 - 56
  • [43] EFFECTS OF COPPER DOPING ON THE ELECTRONIC-PROPERTIES OF CDS FILMS SINTERED WITH CDCL2
    MOON, JT
    IM, HB
    JOURNAL OF MATERIALS SCIENCE, 1988, 23 (10) : 3475 - 3479
  • [44] Effect of the immersion in CdCl2 and annealing on physical properties of CdS:F films grown by CBD
    de Moure-Flores, F.
    Nieto-Zepeda, K. E.
    Guillen-Cervantes, A.
    Gallardo, S.
    Quinones-Galvan, J. G.
    Hernandez-Hernandez, A.
    Olvera, M. de la L.
    Zapata-Torres, M.
    Kundriavtsev, Yu
    Melendez-Lira, M.
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2013, 74 (04) : 611 - 615
  • [45] Growth and properties of titania and aluminum titanate thin films obtained by r.f. magnetron sputtering
    Kuo, DH
    Tzeng, KH
    THIN SOLID FILMS, 2002, 420 : 497 - 502
  • [46] Influence of deposition conditions on the properties of a-GeC:H and a-Ge:H films prepared by r.f. magnetron sputtering
    Takamatsu Natl Coll of Technology, Takamatsu, Japan
    Thin Solid Films, 1-2 (69-74):
  • [47] Effect of annealing on the properties of transparent conducting Ag doped ZnO thin films prepared by r.f. magnetron sputtering method
    Thi Ha Tran
    Thi Ngoc Anh Tran
    Thanh Cong Bach
    Cong Doanh Sai
    Nguyen Hai Pham
    Van Tan Tran
    Thanh Binh Nguyen
    Quang Hoa Nguyen
    Van Thanh Pham
    Quoc Khoa Doan
    Viet Tuyen Nguyen
    MICRO AND NANOSTRUCTURES, 2022, 166
  • [48] Optimization of process parameters for the electrical properties in Ga-doped ZnO thin films prepared by r.f. magnetron sputtering
    Zhu, D. L.
    Wang, Q.
    Han, S.
    Cao, P. J.
    Liu, W. J.
    Jia, F.
    Zeng, Y. X.
    Ma, X. C.
    Lu, Y. M.
    APPLIED SURFACE SCIENCE, 2014, 298 : 208 - 213
  • [49] Influence of the process parameters on structural and electrical properties of r.f. magnetron sputtering ITO films
    Baía, I
    Fernandes, B
    Nunes, P
    Quintela, M
    Martins, R
    THIN SOLID FILMS, 2001, 383 (1-2) : 244 - 247
  • [50] Effects of CdCl2 heat treatment on the morphological and chemical properties of CdTe/CdS thin films solar cells
    AbuEl-Rub, Khaled M.
    Hahn, S-R
    Tari, S.
    Dissanayake, M. A. K. L.
    APPLIED SURFACE SCIENCE, 2012, 258 (16) : 6142 - 6147