Scatteroscope for testing polished surfaces

被引:0
|
作者
Chabros, W [1 ]
机构
[1] Inst Appl Opt, PL-03805 Warsaw, Poland
关键词
scatter; rms roughness;
D O I
10.1117/12.501409
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An instrument for inspecting polished surfaces was built in the Institute of Applied Optics. The instrument called scateroscope anables measuring the rms roughness and visualisation of surface defects and particles of contamination. it is especially useful for assessment high quality glass plates, mirrors and semiconductor wafers. The measured plates can be sticked on polishing wheel and can be tested during the polishing process.
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页码:114 / 121
页数:8
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