Directivity optimization of PZT based microspeaker array

被引：2
|
作者：
Zhu, Yi-Ping [1 ]
Ren, Tian-Ling [1 ]
Yang, Yi [1 ]
Wu, Xiao-Ming [1 ]
Zhang, Ning-Xin [1 ]
Liu, Li-Tian [1 ]
Li, Zhi-Jian [1 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
INTEGRATED FERROELECTRICS | 2007年 / 89卷
关键词：
PZT; microspeaker array; directivity; -3dB beam width; minor lobe level;
D O I：
10.1080/10584580601077450
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, the directivity is optimized for a PZT based microspeaker array. The SiO2/Pt/Pb(Zr,Ti)O-3/Pt/Ti/SiO2 multimorph structure has been designed and fabricated to be the microspeaker cell using silicon based micro-machining process. The membrane size of the single transducer cell is 1000 x 1000 x 2.5 mu m(3), and the main resonance frequency is located near 68 kHz (lambda = 5 mm). Directivity is a very important parameter for microspeaker array. Dissimilar arrangement of the cells in transducer array could cause different directivity performance. After comparison, when achieving a good transmitting directivity, the square combined plane array has the smallest area.
引用
收藏
页码：20 / 28
页数：9
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