Compact thermo-optic modulator based on a titanium dioxide micro-ring resonator

被引:10
|
作者
Yu, Hongyan [1 ,2 ,3 ]
Qiu, Feng [2 ,3 ]
机构
[1] Zhejiang Univ, Hangzhou 310058, Zhejiang, Peoples R China
[2] Westlake Univ, Sch Engn, Key Lab 3D Micro Nano Fabricat & Characterizat Zh, 18 Shilongshan Rd, Hangzhou 310024, Zhejiang, Peoples R China
[3] Westlake Inst Adv Study, Inst Adv Technol, 18 Shilongshan Rd, Hangzhou 310024, Zhejiang, Peoples R China
基金
中国国家自然科学基金;
关键词
REFRACTIVE-INDEXES; SILICON; COEFFICIENTS; SWITCH; LIGHT; SI3N4;
D O I
10.1364/OL.456876
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Thermo-optic (TO) modulators with the ability of working from the visible to the infrared spectrum are promising for many emerging applications. However, current technologies suffer from either a limited operating spectrum range or weak TO effect. In this work, we present an effective TO modulator based on a titanium dioxide TiO2 micro-ring resonator with solgel SiO2 as the cladding. Taking advantage of the large negative TO coefficients of TiO2 and solgel SiO2, the fabricated device demonstrates a temperature-dependent wavelength shift of 58.3 pm/degrees C and a pi-shift power consumption of 7.8 mW. Since both TiO2 and solgel SiO2 have a broad transmission window, the demonstrated device will have wide applications in integrated optics from the visible to the infrared wavelength range. (C) 2022 Optica Publishing Group
引用
收藏
页码:2093 / 2096
页数:4
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