Laser applications for micromachining

被引：0
|
作者：
Esashi, M [1 ]
Minami, K [1 ]
机构：
[1] TOHOKU UNIV,FAC ENGN,SENDAI,MIYAGI 98077,JAPAN
来源：
LASER INTERACTION AND RELATED PLASMA PHENOMENA | 1996年 / 369期
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：1268 / 1273
页数：6
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