Large rotation angle micromirror based on hypocycloidal electrothermal actuators

被引：1
|
作者：
Xu, Y. [1 ]
Singh, J. [1 ]
Chen, N. [2 ]
机构：
[1] Inst Microelect, ASTAR Agcy Sci Technol & Res, Singapore 117685, Singapore
[2] Natl Univ Singapore, Div Bioengn, Singapore 119077, Singapore
来源：
ELECTRONICS LETTERS | 2010年 / 46卷 / 10期
关键词：
Cutoff frequency - Electrostatic actuators;
D O I：
10.1049/el.2010.0493
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A large rotation angle micromirror using hypocycloidal electrothermal actuators (HEAs) is presented. The mechanical rotation angle of the micromirror is similar to 35 degrees at 2.6 V in nonresonant mode. The Cr/Au coated square mirror plate is supported by two groups of HEAs in order to achieve single axis rotation. Four Al/Si bimorph structures are staggerly connected in parallel to form a HEA. This structure is experimentally demonstrated to increase the deflection angle. Moreover, the rotation axis keeps still and there is no lateral shifting effect. The -3 dB cutoff frequency was found to be about 29 Hz as the large signal frequency response.
引用
收藏
页码：704 / 705
页数：2
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