共 50 条
- [41] Optical coherence tomography system using a micro-mirror [J]. PHOTONICS 2010: TENTH INTERNATIONAL CONFERENCE ON FIBER OPTICS AND PHOTONICS, 2011, 8173
- [42] Novel micro-mirror sensor based thermal detector [J]. TM-TECHNISCHES MESSEN, 2014, 81 (05) : 219 - 227
- [43] Study of a deformable micro-mirror based on PZT films [J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2007, 9 (11): : 1014 - 1018
- [44] Digital micro-mirror devices for laser beam shaping [J]. FIFTH CONFERENCE ON SENSORS, MEMS, AND ELECTRO-OPTIC SYSTEMS, 2019, 11043
- [46] Development of a deformable mirror based on conductive polymer actuator arrays for adaptive optics [J]. ELECTROACTIVE POLYMER ACTUATORS AND DEVICES (EAPAD) 2010, 2010, 7642
- [48] A novel type of vertical torsion micro-mirror with combs [J]. PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 3, 2004, : 281 - 285
- [49] Monolithically integrated out-of-plane micro-mirror [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2012, 179 : 263 - 276
- [50] Illumination system with micro-mirror array, for lithographic apparatus [J]. Research Disclosure, 2006, (509): : 1166 - 1167