Observation of a localized electron beam in large-area microwave discharge (vol 82, pg 694, 2003)

被引：0
|
作者：
Terebessy, T [1 ]
Siry, M
Kando, M
Kudela, J
Korzec, D
机构：
[1] Shizuoka Univ, Grad Sch Elect Sci & Technol, Hamamatsu, Shizuoka 4328561, Japan
[2] ANELVA Corp, Advance Technol Dev Div, Tokyo 1838508, Japan
[3] Univ Wuppertal, Microstruct Res Ctr, D-42119 Wuppertal, Germany
来源：
APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 11期
关键词：
D O I：
10.1063/1.1562948
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1799 / 1799
页数：1
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