ALD Encapsulation of CVD WS2 for Stable and High-Performance FET Devices

被引：2

作者：

Wu, Xiangyu ^{[1
]}

Lin, Dennis ^{[1
]}

Cott, Daire ^{[1
]}

De Marneffe, Jean-Francois ^{[1
]}

Groven, Benjamin ^{[1
]}

Sergeant, Stephanie ^{[1
]}

Shi, Yuanyuan ^{[1
]}

Smets, Quentin ^{[1
]}

Sutar, Surajit ^{[1
]}

Asselberghs, Inge ^{[1
]}

Radu, Iuliana ^{[1
]}

机构：

[1] IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

来源：

2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM) | 2021年

关键词：

D O I：

10.1109/EDTM50988.2021.9420940

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Processing and characterization of double gate CVD WS2 devices are presented in this work. By combining H-2 plasma cleaning and trimethylaluminium (TMA) soak initiated ALD process, double gate (DG) WS2 devices with clean and high-quality interface is obtained, leading to significant improvement in hysteresis and mobility as compared with uncapped devices. Double gate modulation is demonstrated, showing enhanced gate control and better I-on as compared with single gate operation.

引用

页数：3

共 50 条

[1] Stable and high-performance piezoelectric sensor via CVD grown WS2
Kim, Junyoung
Lee, Eunho
Mehta, Gayatri
Choi, Wonbong
NANOTECHNOLOGY, 2020, 31 (44)
[2] High-Performance WS2 MOSFETs with Bilayer WS2 Contacts
Jin, Lun
Wen, Jiaxuan
Odlyzko, Michael
Seaton, Nicholas
Li, Ruixue
Haratipour, Nazila
Koester, Steven J.
ACS OMEGA, 2024, 9 (29): : 32159 - 32166
[3] Highly Oriented WS2 Monolayers for High-Performance Electronics
Zhan, Li
Pei, Xudong
Tang, Jiachen
Li, Shuaixing
Li, Shuo
Li, Yuan
Li, Lintao
Wan, Changjin
Deng, Yu
Shi, Yi
Hao, Yufeng
Li, Songlin
ADVANCED MATERIALS, 2025, 37 (06)
[4] Design of MXene contacts for high-performance WS2 transistors
Li, Chenliang
Guo, Jing
Wang, Chaoying
Ma, Decai
Wang, Baolai
APPLIED SURFACE SCIENCE, 2020, 527
[5] Encapsulation of SnO2 by carbon nanotubes and WS2 to form high-performance lithium-ion batteries materials
Jiang, Wenqin
Xiong, Deping
Wu, Shanshan
Gao, Jiongjian
Wu, Kaidan
Wang, Tao
Wang, Qu
Feng, Yefeng
He, Miao
Feng, Zuyong
CERAMICS INTERNATIONAL, 2023, 49 (20) : 33147 - 33155
[6] High performance complementary WS2 devices with hybrid Gr/Ni contacts
Khan, Muhammad Farooq
Ahmed, Faisal
Rehman, Shania
Akhtar, Imtisal
Rehman, Malik Abdul
Shinde, Pragati A.
Khan, Karim
Kim, Deok-Kee
Eom, Jonghwa
Lipsanen, Harri
Sun, Zhipei
NANOSCALE, 2020, 12 (41) : 21280 - 21290
[7] WS2 Nanowires as a High-Performance Anode for Sodium-Ion Batteries
Liu, Yongchang
Zhang, Ning
Kang, Hongyan
Shang, Minghui
Jiao, Lifang
Chen, Jun
CHEMISTRY-A EUROPEAN JOURNAL, 2015, 21 (33) : 11878 - 11884
[8] Ultrathin WS2 Nanoflakes as a High-Performance Electrocatalyst for the Hydrogen Evolution Reaction
Cheng, Liang
Huang, Wenjing
Gong, Qiufang
Liu, Changhai
Liu, Zhuang
Li, Yanguang
Dai, Hongjie
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2014, 53 (30) : 7860 - 7863
[9] Hierarchically interconnected WS2/graphene foam for high-performance sodium storage
Wei, Zeyu
Zhang, Yunlong
Li, Mingrun
Shu, Chaozhu
Deng, Dehui
JOURNAL OF ENERGY STORAGE, 2024, 81
[10] Stable WS2/WO3 Composites as High-Performance Cathode for Rechargeable Aluminum-Ion Batteries
Lu, Shuangxing
Lu, Tengda
Luo, Wenbin
Chao, Zisheng
Liu, Yanhui
Zhang, Zhen
Fan, Jincheng
ENERGY & FUELS, 2022, 36 (14) : 7890 - 7897

← 1 2 3 4 5 →