Development of UV-LIGA integrated vibrometer using 3x3 directional coupler

The trend toward miniaturization and the intensive development work being performed in the areas of microsystem technology (MST) have led to the idea of developing Totally Implantable Hearing Aids (TIHAs). Here, we will present the design and fabrication of an implantable system for contactless detection of the vibrations of the middle ear ossicle. The system has been constructed in a form of an integrated optic vibrometer, an innovative solution, which can be used as a microphone for a TIHA. This paper presents the, design optimization of the integrated optical component (IOC). Furthermore, we will describe simulation results and the fabrication using ultraviolet LIGA and hot embossing processes. Special attention will be given on the presentation of achievements, but also on the problems that we faced with in the fabrication. (c) 2007 Elsevier B.V. All rights reserved.