Direct growth of Si nanowires on flexible organic substrates

被引:7
|
作者
Tian, Lin [1 ]
Di Mario, Lorenzo [1 ]
Minotti, Antonio [1 ]
Tiburzi, Giorgio [2 ]
Mendis, Budhika G. [2 ]
Zeze, Dagou A. [2 ]
Martelli, Faustino [1 ]
机构
[1] CNR, IMM, Via Fosso del Cavaliere 100, I-00133 Rome, Italy
[2] Univ Durham, Durham, England
基金
欧盟第七框架计划;
关键词
silicon nanowires; flexible electronics; plasma-enhanced chemical vapor deposition; polyimide; LOW-TEMPERATURE GROWTH; SILICON NANOWIRES; DIFFRACTION PATTERNS; ARRAYS; FABRICATION; FILMS;
D O I
10.1088/0957-4484/27/22/225601
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A key characteristic of semiconductor nanowires (NWs) is that they grow on any substrate that can withstand the growth conditions, paving the way for their use in flexible electronics. We report on the direct growth of crystalline silicon nanowires on polyimide substrates. The Si NWs are grown by plasma-enhanced chemical vapor deposition, which allows the growth to proceed at temperatures low enough to be compatible with plastic substrates (350 degrees C), where gold or indium are used as growth seeds. In is particularly interesting as the seed not only because it leads to a better NW crystal quality but also because it overcomes a core problem induced by the use of Au in silicon processing, i.e. Au creates deep carrier traps when incorporated in the nanowires.
引用
收藏
页数:6
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