Structure of carbon nanotubes grown by microwave-plasma-enhanced chemical vapor deposition

被引：93
|
作者：
Okai, M [1 ]
Muneyoshi, T [1 ]
Yaguchi, T [1 ]
Sasaki, S [1 ]
机构：
[1] Hitachi Ltd, Cent Res Labs, Display Grp, Kokubunji, Tokyo 1858601, Japan
来源：
APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 21期
关键词：
D O I：
10.1063/1.1317534
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Carbon nanotubes grown on a Ni substrate and an Fe-Ni-Cr alloy substrate by plasma-enhanced chemical vapor deposition were investigated by transmission electron microscope (TEM) and energy dispersive x-ray (EDX) analysis. TEM showed that the nanotubes on both substrates have a piled-cone structure with metal particles on top which determine the diameter of the nanotubes. Their diameter ranges from 60 to 80 nm. Moreover, EDX showed that the metal particles are composed of Ni when the nanotubes are grown on Ni substrate and of Fe and Ni in the case of the Fe-Ni-Cr alloy substrate. (C) 2000 American Institute of Physics. [S0003-6951(00)04541-1].
引用
收藏
页码：3468 / 3470
页数：3
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