Nanostructured Kinoform Optical Elements for High Power Laser Systems

被引：0
|
作者：
Atuchin, Victor V. [1 ]
Soldatenkov, Ivan S. [1 ]
机构：
[1] Russian Acad Sci, Inst Semicond Phys, Lab Opt Mat & Struct, Novosibirsk 630090, Russia
来源：
EDM: 2009 10TH INTERNATIONAL CONFERENCE AND SEMINAR ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES | 2009年
关键词：
Kinoform; fused silica; photolithography; wet etching; WAVE-FRONT DISLOCATIONS; PHASE CORRECTION; VORTEX; GENERATION; SILICA; DAMAGE; BEAMS;
D O I：
10.1109/EDM.2009.5173937
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Different kinoform elements have been fabricated in fused silica by precise chemical etching. Kinoform phase relief have been made with an accuracy of similar to 5 nm. A vortex kinoform mode converter which transforms a zero order Hermite-Gaussian laser mode to first order Laguerre-Gaussian mode with screw phase dislocation has been demonstrated. Conversion efficiency >90% for high power laser beams has been achieved in testing experiments.
引用
收藏
页码：89 / 91
页数：3
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