Microstructure and magnetic properties of NdFeB/Mo multilayered films prepared by magnetron sputtering

被引：0
|
作者：
Fu, Yudong [1 ]
Yan, Feng [1 ]
Zhu, Xiaoshuo [1 ]
Feng, Xiaoxue [1 ]
Guo, Zaizai [2 ]
机构：
[1] Harbin Engn Univ, Coll Mat Sci & Chem Engn, Minist Educ, Key Lab Superlight Mat & Surface Technol, Harbin 150001, Peoples R China
[2] China Acad Ordnance Sci, Ningbo Branch, Ningbo 315103, Zhejiang, Peoples R China
来源：
MODERN PHYSICS LETTERS B | 2016年 / 30卷 / 08期
关键词：
NdFeB/Mo multilayered films; magnetron sputtering; annealing; microstructure; magnetic properties; B THIN-FILMS; PERMANENT-MAGNETS; ND2FE14B; ALLOYS; UNDERLAYERS;
D O I：
10.1142/S0217984916501268
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The paper was presented to study the microstructure and magnetic properties of Mo/[NdFeB/Mo] x 10/Mo multilayered films prepared by magnetron sputtering on Si(100) substrate. The SEM observation of microstructure showed that the specimen had fine multilayer structure and the NdFeB layers were successfully separated by Mo layers on the cross-section. The interface between the NdFeB and Mo layer disappeared after annealing. X-ray diffraction patterns of the annealed films revealed that there are a large amount of Nd2Fe14B phases. The thickness of Mo layer had obvious effects on magnetic properties of the samples. When it reached 21 nm, the number and the intensity of NdFeB phase increase, and the remanent magnetization ratio Mr/Ms suddenly rise. The influences of annealing on surface morphology and microstructure of NdFeB thin films were also studied.
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页数：8
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