A novel method of fabrication of diffractive microlens arrays

被引：0
|
作者：
Chen, SH [1 ]
Yi, XJ [1 ]
Ma, H [1 ]
Huang, G [1 ]
Wang, HC [1 ]
Xiong, T [1 ]
Li, X [1 ]
Li, XW [1 ]
机构：
[1] Huazhong Univ Sci & Technol, Dept Optoelect Engn, Wuhan 430074, Peoples R China
来源：
MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS | 2003年 / 4984卷
关键词：
self-alignment method; diffractive microlens arrays; diffraction efficiency;
D O I：
10.1117/12.501841
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：253 / 260
页数：8
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