Atmospheric Pressure RF Discharge in Neon and Helium

被引:3
|
作者
Josepson, Raavo [1 ]
Navratil, Zdenek [1 ]
Dosoudilova, Lenka [1 ]
Dvorak, Pavel [1 ]
Trunec, David [1 ]
机构
[1] Masaryk Univ, Dept Phys Elect, CS-61137 Brno, Czech Republic
关键词
Atmospheric-pressure plasmas; neon and helium; radio frequency capacitive discharge;
D O I
10.1109/TPS.2014.2307080
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Radio frequency (13.56 MHz) capacitive discharges at atmospheric pressure in neon and helium were studied by ICCD imaging. The discharges were generated between parallel plate metal electrodes with a gap of 2 mm. At certain conditions, a homogeneous discharge burning in alpha-mode can be generated both in helium and neon. The time-resolved images of discharges reveal similarities in atomic excitation mechanism in both gases.
引用
收藏
页码:2348 / 2349
页数:2
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