Surface diagnostics by means of scanning force microscopy (review)

被引：0
|
作者：
Bukharaev, AA [1 ]
Ovchinnikov, DV [1 ]
Bukharaeva, AA [1 ]
机构：
[1] Russian Acad Sci, Kazan Sci Ctr, EK Zavoiskii Kazan Engn Phys Inst, Kazan, Russia
来源：
INDUSTRIAL LABORATORY | 1997年 / 63卷 / 05期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This review is concerned with the application of scanning force microscopes (SFM) to surface diagnostics: microtopography and tribological, electric, and magnetic characteristics used in the practice of modem micro- and nanotechnologies. The principles underlying the performance and design of SFM are outlined briefly. The mechanisms of force interaction between the SFM microprobe and the surface and the effect of environmental and measuring conditions on the experimental results are discussed. A comparative analysis of advantages and limitations of SFM used, in particular, as a metrological tool is given. A computer-aided method for the recovery of experimental SFM surface images and its use for improving the accuracy of determination of linear dimensions of surface structures is presented.
引用
收藏
页码：265 / 281
页数：17
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