3D Heterogeneous Package Integration of Air/Magnetic Core Inductor: 89%-Efficiency Buck Converter with Backside Power Delivery Network

被引:0
|
作者
Sun, Xiao [1 ]
Lin, Hesheng [1 ,2 ]
Velenis, Dimitrios [1 ]
Slabbekoorn, John [1 ]
Talmelli, Giacomo [1 ,2 ]
Bex, Pieter [1 ]
Sterken, Tom [1 ]
Lauwereins, Rudy [1 ,2 ]
Adelmann, Christoph [1 ]
Miller, Andy [1 ]
Van der Plas, Geert [1 ]
Beyne, Eric [1 ]
机构
[1] IMEC, Leuven, Belgium
[2] Katholieke Univ Leuven, Leuven, Belgium
关键词
D O I
10.1109/vlsitechnology18217.2020.9265045
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
We demonstrate a novel concept of integrating 110-mu m-thick low-resistance high-Q magnetic core inductors in fan-out wafer level packaging (FOWLP). Unlike thin-film magnetic core inductors [1], this solution offers the possibility to embed thick cores to meet power density requirements, allowing for 89% efficiency at 1.2 W/mm(2) power density for 2:1 power conversion with a backside power delivery network (BSPDN) using circular-shaped magnetic inductors.
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