Near-field scanning microwave microscope using a dielectric resonator

被引：0
|
作者：
Kim, J [1 ]
Kim, H [1 ]
Kim, M [1 ]
Friedman, B [1 ]
Lee, K [1 ]
机构：
[1] Sogang Univ, Dept Phys, Seoul 121742, South Korea
来源：
REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION, VOLS 22A AND 22B | 2003年 / 20卷
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D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
We describe a near-field scanning microwave microscope which uses a high-quality dielectric resonator with a tunable screw. The operating frequency is f = 4.5 GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator. By tuning the tunable screw coming through the top cover, we could improve sensitivity, signal-to-noise ratio, and spatial resolution to better than 1.5 mum. To demonstrate the ability of local microwave characterization, the surface resistance of metallic thin films has been mapped.
引用
收藏
页码：456 / 461
页数：6
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