Near-field scanning microwave microscope using a dielectric resonator

被引：0

作者：

Kim, J ^{[1
]}

Kim, H ^{[1
]}

Kim, M ^{[1
]}

Friedman, B ^{[1
]}

Lee, K ^{[1
]}

机构：

[1] Sogang Univ, Dept Phys, Seoul 121742, South Korea

来源：

REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION, VOLS 22A AND 22B | 2003年 / 20卷

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We describe a near-field scanning microwave microscope which uses a high-quality dielectric resonator with a tunable screw. The operating frequency is f = 4.5 GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator. By tuning the tunable screw coming through the top cover, we could improve sensitivity, signal-to-noise ratio, and spatial resolution to better than 1.5 mum. To demonstrate the ability of local microwave characterization, the surface resistance of metallic thin films has been mapped.

引用

页码：456 / 461

页数：6

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