SINGLE-MATERIAL MEMS USING POLYCRYSTALLINE DIAMOND

被引：0
|
作者：
Cao, Zongliang [1 ]
Varney, Mike [1 ]
Aslam, Dean [1 ]
机构：
[1] Michigan State Univ, Micro & Nano Technol Lab, E Lansing, MI 48824 USA
来源：
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年
关键词：
TECHNOLOGY;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The multi-material MEMS fabrication process often requires a larger number of masks making it more expensive as compared to single-material MEMS (SMM) technology. By varying the doping level in poly-C, semi-conducting, metallic and insulating (undoped) properties are achieved that are needed for poly-C SMM. However, the development of diamond-based SMM technology faces a number of challenges including (a) producing highly-insulating and highly-conducting poly-C films, (b) creating ohmic contacts and (c) patterning by dry etching of poly-C films grown on Si or SiO(2). These challenges are addressed in this paper.
引用
收藏
页码：51 / 54
页数：4
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