Comparison of structure and electron-field-emission behavior of chemical-vapor-deposited diamond and pulsed-laser-deposited diamond-like carbon films

被引:2
|
作者
Cheng, HF [1 ]
Chen, YC
Wang, YL
Chen, YY
Tsau, BJ
Chen, T
Lin, IN
机构
[1] Natl Taiwan Normal Univ, Dept Phys, Taipei 117, Taiwan
[2] Natl Tsing Hua Univ, Dept Phys, Hsinchu 300, Taiwan
[3] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 300, Taiwan
关键词
electron field emission; diamond-like carbon films and diamond films; pulsed laser deposition; chemical vapor deposition;
D O I
10.1143/JJAP.39.1866
中图分类号
O59 [应用物理学];
学科分类号
摘要
The correlation between the structure and the electron-field-emission behavior of chemical-vapor-deposited (CVD) diamond films and those of pulsed-laser-deposited (PLD) diamond-like carbon (DLC) films is investigated. The CVD films contain crystalline diamonds (sp(3)-bonds) separated from amorphous carbon (sp(2)-bonds), possessing a large electron-field-emission current density [(J(e))(CVD) = 140 mu A/cm(2) at 21.6 V/mu m], a low turn-on field [(E-0)(CVD) = 10 V/mu m] and a single-value effective work function [(Phi(e))(CVD) = 0.082 eV]. In contrast, the pulsed-laser-deposited DLC films exhibit even better electron field emission properties [(J(e))(DLC) = 320 mu A/cm(2) at 21.6 V/mu m, (E-0)(DLC) = 8 V/mu m] and a wide range of effective work functions [(Phi(e))(DLC) = 0.016-0.031eV]. The superior electron-field-emission properties of DLC films, as compared with those of CVD diamonds, are ascribed to their nanostructured grains, which contain a mixture of sp(3)-bonds and sp(2)-bonds.
引用
收藏
页码:1866 / 1871
页数:6
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