Influence of modulation ratio on structure and properties of nanoscale ZrB2/ZrAlN multilayered coatings

被引：4
|
作者：
Li DeJun [1 ]
Kang YuanBin [1 ]
Dong Lei [1 ]
Deng XiangYun [1 ]
Liu Hao [2 ]
Sun XueLiang [2 ]
机构：
[1] Tianjin Normal Univ, Coll Phys & Elect Informat Sci, Tianjin 300387, Peoples R China
[2] Univ Western Ontario, Dept Mech & Mat Engn, London, ON, Canada
来源：
SCIENCE CHINA-TECHNOLOGICAL SCIENCES | 2010年 / 53卷 / 03期
基金：
中国国家自然科学基金;
关键词：
ZrB2/ZrAlN multilayered coating; magnetron sputtering; modulation ratio; nanoscale; MECHANICAL-PROPERTIES; THERMAL-STABILITY; MICROSTRUCTURE; HARDNESS;
D O I：
10.1007/s11431-009-0241-y
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
ZrB2/ZrAlN multilayered coatings with various modulation ratios (t(ZrB2):t(ZrAlN)) and constant modulation periods were prepared by magnetron sputtering system at room temperature. SEM, XRD, surface profiler and nano-indenter were employed to investigate the influences of t(ZrB2):t(ZrAlN) on the microstructure and mechanical properties of the coatings. Sharp interfaces and nanoscale multilayered modulation were confirmed by SEM. The multilayer with modulation period of 40 nm and ratio of 3:1 displayed the highest hardness (36.4 GPa) and critical fracture load (76.477 mN) with lower stress. The polycrystalline structure and multilayered modulate structure were directly responsible for the enhanced mechanical properties.
引用
收藏
页码：772 / 775
页数：4
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