Oil thermal annealed nano-structured indium tin oxide thin films for display applications

被引:1
|
作者
Qasim, Mehdi [1 ]
Al-Dabbagh, Jinan [1 ]
Ahmed, Naser Mahmoud [2 ]
Chigrinov, V. G. [3 ]
Hegde, Gurumurthy [1 ]
机构
[1] Univ Malaysia Pahang, Fac Ind Sci & Technol, Gambang Kuantan 26300, Pahang, Malaysia
[2] Univ Sains Malaysia, Sch Phys, George Town 11800, Malaysia
[3] Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Hong Kong, Peoples R China
关键词
oil thermal annealing; ITO thin film; surface morphology; nano layered; displays;
D O I
10.1002/jsid.236
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Indium tin oxide-coated thin films (200nm) are deposited on glass substrates by using R.f. sputtering technique. Here, we investigate the influence of new technique of treatment, which is called as oil thermal annealing on the nano-structured indium tin oxide thin films at fixed temperature (150 degrees C) which improves adhesion strength, electrical conductivity and optical properties (transmittance) of the films. Oil thermal annealing is used to reduce inherent defects that may be introduced during the prepared thin film and cooling processes. Proposed technique is highly suitable for liquid crystal displays, solar cells and organic light emitting diodes, and many other display-related applications.
引用
收藏
页码:187 / 190
页数:4
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