Thermoreflectance imager sees microscopic IC features through silicon

被引：0
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作者：
Tessier, Gilles
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来源：
LASER FOCUS WORLD | 2007年 / 43卷 / 06期
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：11 / 11
页数：1
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