A Carbon Nanotube Capacitor

被引：3
|
作者：
Budnik, Mark M. [1 ]
Johnson, Eric W. [1 ]
机构：
[1] Valparaiso Univ, Dept Elect & Comp Engn, Valparaiso, IN 46383 USA
来源：
2009 IEEE NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE | 2009年
关键词：
INTERCONNECTS;
D O I：
10.1109/NMDC.2009.5167520
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We introduce a vertical carbon nanotube capacitor with high capacitance per unit area. Using an electrical model of single-walled, metallic carbon nanotubes and the extracted capacitance values of a carbon nanotube bundle network, we develop an electrical model for the capacitor. The device can exhibit a capacitance greater than 175fF/mu m(2).
引用
收藏
页码：233 / 236
页数：4
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