Measurement of in-plane vibrational patterns in piezoelectric devices using laser speckle

被引:4
|
作者
Watanabe, Y [1 ]
Sato, T [1 ]
Goka, S [1 ]
Sekimoto, H [1 ]
机构
[1] Tokyo Metropolitan Univ, Grad Sch Engn, Setagaya Ku, Tokyo 1920397, Japan
关键词
piezoelectric resonator; laser speckle; two dimensional correlation; mode; shape;
D O I
10.1143/JJAP.42.3120
中图分类号
O59 [应用物理学];
学科分类号
摘要
A non-mechanical scanning method for visualizing the mode shapes of piezoelectric devices is described. Laser speckle interference, periodic resonator excitation, charge coupled device image captures, and image processing using two-dimensional correlation filtering are effectively combined in this method. Even with small data averaging and a short measurement time, this method produces very clear, high-contrast mode shaped images.
引用
收藏
页码:3120 / 3121
页数:2
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