Controlled Formation of Surface Patterns in Metal Films Deposited on Elasticity-Gradient PDMS Substrates

被引:72
|
作者
Yu, Senjiang [1 ]
Sun, Yadong [1 ]
Ni, Yong [2 ]
Zhang, Xiaofei [1 ]
Zhou, Hong [1 ]
机构
[1] China Jiliang Univ, Dept Phys, Hangzhou 310018, Zhejiang, Peoples R China
[2] Univ Sci & Technol China, CAS Key Lab Mech Behav & Design Mat, Dept Modern Mech, Hefei 230026, Anhui, Peoples R China
基金
中国国家自然科学基金;
关键词
thin film; surface pattern; fold; wrinkle; elasticity gradient; BUCKLING-BASED METROLOGY; THIN-FILMS; STRETCHABLE ELECTRONICS; SPUTTER-DEPOSITION; COMPRESSIVE STRESS; OPTICAL-PROPERTIES; WRINKLES; POLYMER; DELAMINATION; GROWTH;
D O I
10.1021/acsami.5b12369
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Controlled surface patterns are useful in a wide range of applications including flexible electronics, elastomeric optics, fluidic channels, surface engineering, measurement technique, biological templates, stamps, and sensors. In this work, we report on the controlled formation of surface patterns in metal films deposited on elasticity-gradient polydimethylsiloxane (PDMS) substrates. Because of the temperature gradient during the curing process, the PDMS substrate in each sample successively changes from a purely liquid state at one side to a purely elastic state at the opposite side. It is found that surface folds appear in the liquid or viscous PDMS region while wrinkles form in the elastic region. In the transition region from the liquid to elastic PDMS, a nested pattern (i.e., the coexisting of folds and wrinkles) can be observed. The folding wave is triggered by the intrinsic stress during the film deposition and its wavelength is independent of the film thickness. The wrinkling wave is induced by the thermal compression after deposition and its wavelength is proportional to the film thickness. The report in this work could promote better understanding of the effect of substrate elasticity on the surface patterns and fabrication of such patterns (folds and wrinkles) by tuning the substrate property.
引用
收藏
页码:5706 / 5714
页数:9
相关论文
共 50 条
  • [31] Texture transformations in reactive metal films deposited upon amorphous substrates
    Dunn, DN
    Hull, R
    Ross, FM
    Tromp, RM
    [J]. JOURNAL OF APPLIED PHYSICS, 2001, 89 (05) : 2635 - 2640
  • [32] Wrinkling patterns of tantalum films on modulus-gradient compliant substrates
    Li, Kaiyuan
    Wang, Jian
    Shao, Bowen
    Xiao, Junxiong
    Zhou, Hong
    Yu, Senjiang
    [J]. THIN SOLID FILMS, 2018, 654 : 100 - 106
  • [33] Biomimetically Controlled Formation of Nanotextured Silica/Titania Films on Arbitrary Substrates and Their Tunable Surface Function
    Jin, Ren-Hua
    Yuan, Jian-Jun
    [J]. ADVANCED MATERIALS, 2009, 21 (37) : 3750 - 3753
  • [34] Controlled Fabrication of Gradient Patterns Based on Surface Wrinkling
    Zhao, Xue-ning
    Yin, Jian
    Lu, Cong-hua
    [J]. ACTA POLYMERICA SINICA, 2017, (03): : 556 - 562
  • [35] Controlled wrinkling patterns and surface friction by thickness gradient
    Sun, Yu
    Wu, Kai
    Wang, Yaqiang
    Zhang, Jinyu
    Liu, Gang
    Sun, Jun
    [J]. SURFACE & COATINGS TECHNOLOGY, 2020, 401
  • [36] FRACTURE AND WRINKLE PATTERNS IN METAL FILMS DEPOSITED ON LIQUID MENISCUSES
    Zhang, Yong-Ju
    Yu, Sen-Jiang
    Zhou, Hong
    Cai, Ping-Gen
    [J]. SURFACE REVIEW AND LETTERS, 2018, 25 (04)
  • [37] Forming surface dynamics of conductive aluminum films deposited on amorphous substrates
    Starostenko, V.V.
    Mazinov, A.S.
    Fitaev, I.S.
    Taran, E.P.
    Orlenson, V.B.
    [J]. Applied Physics, 2019, 2019-January (04): : 60 - 65
  • [38] Thick DLC films deposited by PECVD on the internal surface of cylindrical substrates
    Lusk, D.
    Gore, M.
    Boardman, W.
    Casserly, T.
    Boinapally, K.
    Oppus, M.
    Upadhyaya, D.
    Tudhope, A.
    Gupta, M.
    Cao, Y.
    Lapp, S.
    [J]. DIAMOND AND RELATED MATERIALS, 2008, 17 (7-10) : 1613 - 1621
  • [39] Stress relief patterns of Co films deposited on circular silicone oil substrates
    Yu, Sen-Jiang
    Zhou, Hong
    Zhang, Yong-Ju
    Chen, Miao-Gen
    Jiao, Zhi-Wei
    Si, Ping-Zhan
    [J]. THIN SOLID FILMS, 2012, 520 (17) : 5683 - 5690
  • [40] EXAMINATION OF THE FORMATION OF DEPOSITED METAL WITH CONTROLLED CHANGES IN THE PROPERTIES.
    Gulakov, S.V.
    Nosovskii, B.I.
    Temirbek, O.D.
    [J]. 1984, (31):