Controlled Formation of Surface Patterns in Metal Films Deposited on Elasticity-Gradient PDMS Substrates

被引:72
|
作者
Yu, Senjiang [1 ]
Sun, Yadong [1 ]
Ni, Yong [2 ]
Zhang, Xiaofei [1 ]
Zhou, Hong [1 ]
机构
[1] China Jiliang Univ, Dept Phys, Hangzhou 310018, Zhejiang, Peoples R China
[2] Univ Sci & Technol China, CAS Key Lab Mech Behav & Design Mat, Dept Modern Mech, Hefei 230026, Anhui, Peoples R China
基金
中国国家自然科学基金;
关键词
thin film; surface pattern; fold; wrinkle; elasticity gradient; BUCKLING-BASED METROLOGY; THIN-FILMS; STRETCHABLE ELECTRONICS; SPUTTER-DEPOSITION; COMPRESSIVE STRESS; OPTICAL-PROPERTIES; WRINKLES; POLYMER; DELAMINATION; GROWTH;
D O I
10.1021/acsami.5b12369
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Controlled surface patterns are useful in a wide range of applications including flexible electronics, elastomeric optics, fluidic channels, surface engineering, measurement technique, biological templates, stamps, and sensors. In this work, we report on the controlled formation of surface patterns in metal films deposited on elasticity-gradient polydimethylsiloxane (PDMS) substrates. Because of the temperature gradient during the curing process, the PDMS substrate in each sample successively changes from a purely liquid state at one side to a purely elastic state at the opposite side. It is found that surface folds appear in the liquid or viscous PDMS region while wrinkles form in the elastic region. In the transition region from the liquid to elastic PDMS, a nested pattern (i.e., the coexisting of folds and wrinkles) can be observed. The folding wave is triggered by the intrinsic stress during the film deposition and its wavelength is independent of the film thickness. The wrinkling wave is induced by the thermal compression after deposition and its wavelength is proportional to the film thickness. The report in this work could promote better understanding of the effect of substrate elasticity on the surface patterns and fabrication of such patterns (folds and wrinkles) by tuning the substrate property.
引用
收藏
页码:5706 / 5714
页数:9
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