Review on thin-film transistor technology, its applications, and possible new applications to biological cells

被引：51

作者：

Tixier-Mita, Agnes ^{[1
,3
]}

Ihida, Satoshi ^{[2
]}

Segard, Bertrand-David ^{[4
]}

Cathcart, Grant A. ^{[1
]}

Takahashi, Takuya ^{[1
]}

Fujita, Hiroyuki ^{[3
]}

Toshiyoshi, Hiroshi ^{[1
,3
]}

机构：

[1] Univ Tokyo, Res Ctr Adv Sci Technol, Meguro Ku, Tokyo 1538505, Japan

[2] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan

[3] Univ Tokyo, Inst Ind Sci, Ctr Int Res Micronano Mechatron, Meguro Ku, Tokyo 1538505, Japan

[4] Univ Tokyo, Lab Integrated Micromechatron Syst CNRS IIS UMI 2, Meguro Ku, Tokyo 1538505, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 04期

关键词：

GAS SENSORS; FABRICATION; ARRAY; TFT;

D O I：

10.7567/JJAP.55.04EA08

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper presents a review on state-of-the-art of thin-film transistor (TFT) technology and its wide range of applications, not only in liquid crystal displays (TFT-LCDs), but also in sensing devices. The history of the evolution of the technology is first given. Then the standard applications of TFT-LCDs, and X-ray detectors, followed by state-of-the-art applications in the field of chemical and biochemical sensing are presented. TFT technology allows the fabrication of dense arrays of independent and transparent microelectrodes on large glass substrates. The potential of these devices as electrical substrates for biological cell applications is then described. The possibility of using TFT array substrates as new tools for electrical experiments on biological cells has been investigated for the first time by our group. Dielectrophoresis experiments and impedance measurements on yeast cells are presented here. Their promising results open the door towards new applications of TFT technology. (C) 2016 The Japan Society of Applied Physics

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页数：9

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