Research on multi-parameter transducer and Integrated Measurement System(IMS)

被引：0

作者：

Zhang, WD ^{[1
]}

Dong, HF ^{[1
]}

Xiong, JJ ^{[1
]}

Xiong, SS ^{[1
]}

机构：

[1] N China Inst Technol, Taiyuan 030051, Shanxi, Peoples R China

来源：

IMTC/2000: PROCEEDINGS OF THE 17TH IEEE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE: SMART CONNECTIVITY: INTEGRATING MEASUREMENT AND CONTROL | 2000年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a novel high-g monolithic three-dimensional accelerometer is demonstrated, which separate coupled accelerations mechanically through eight parallel beams. The integration of the accelerometer with pressure&tempreture sensor is also demonstrated. The detailed structure design, simulation, manufacture process, package as well as the final testing results are presented. The Integrated Measurement System (IMS) consists of the transducer and an ASIC (TH9801), which is developed for the special application such as weapon, aviation, spaceflight, missile, automotive testing etc.. Two typical applications of the system are demonstrated in the end.

引用

页码：1453 / 1457

页数：5

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