Stable Subloop Behavior in Ferroelectric Si-Doped HfO2

被引:55
|
作者
Lee, Kyoungjun [1 ]
Lee, Hyun-Jae [3 ]
Lee, Tae Yoon [1 ]
Lim, Hong Heon [1 ]
Song, Myeonl Seop [1 ]
Yoo, Hyang Keun [4 ]
Suh, Dong Ik [4 ]
Lee, Jae Gil [4 ]
Zhu, Zhongwei [5 ]
Yoon, Alexander [5 ]
MacDonald, Matthew R. [6 ]
Lei, Xinjian [6 ]
Park, Kunwoo [2 ,7 ]
Park, Jungwon [2 ,7 ]
Lee, Jun Hee [3 ]
Chae, Seung Chul [1 ]
机构
[1] Seoul Natl Univ, Inst Chem Proc, Dept Phys Educ, Seoul 08826, South Korea
[2] Seoul Natl Univ, Inst Chem Proc, Sch Chem & Biol Engn, Seoul 08826, South Korea
[3] UNIST, Sch Energy & Chem Engn, Ulsan 44919, South Korea
[4] SK Hynix Inc, Icheon Si 17336, Gyeonggi Do, South Korea
[5] Lam Res Corp, Fremont, CA 94538 USA
[6] Versum Mat Inc, Kanazawa, Ishikawa 92011, Japan
[7] Inst for Basic Sci Korea, Ctr Nanoparticle Res, Seoul 08826, South Korea
关键词
FeRAM; ferroelectric; multilevel; analogue device; HfO2; RETENTION LOSS; DYNAMICS; MECHANISMS; FIELD;
D O I
10.1021/acsami.9b12878
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The recent demand for analogue devices for neuromorphic applications requires modulation of multiple nonvolatile states. Ferroelectricity with multiple polarization states enables neuromorphic applications with various architectures. However, deterministic control of ferroelectric polarization states with conventional ferroelectric materials has been met with accessibility issues. Here, we report unprecedented stable accessibility with robust stability of multiple polarization states in ferroelectric HfO2. Through the combination of conventional voltage measurements, hysteresis temperature dependence analysis, piezoelectric force microscopy, first-principles calculations, and Monte Carlo simulations, we suggest that the unprecedented stability of intermediate states in ferroelectric HfO2 is due to the small critical volume size for nucleation and the large activation energy for ferroelectric dipole flipping. This work demonstrates the potential of ferroelectric HfO2 for analogue device applications enabling neuromorphic computing.
引用
收藏
页码:38929 / 38936
页数:8
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