共 50 条
- [1] Annealing behavior of ferroelectric Si-doped HfO2 thin films [J]. THIN SOLID FILMS, 2016, 615 : 139 - 144
- [7] Ferroelectric Si-doped HfO2 Capacitors for Next-Generation Memories [J]. 2019 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA), 2019,
- [9] Ion Implantation Synthesis of Si-doped HfO2 Ferroelectric Thin Films [J]. 2018 IEEE 2ND ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2018), 2018, : 44 - 46
- [10] Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2014, 32 (03):