Ferrite-integrated on-chip inductors for RF ICs

被引：34

作者：

Yang, Chen ^{[1
]}

Liu, Feng

Ren, Tian-Ling

Liu, Li-Tian

Chen, Guanc

Guan, Xiao-Kang

Wang, Albert

Feng, Hai-Gang

机构：

[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China

[2] IIT, Dept Elect & Comp Engn, Chicago, IL 60616 USA

来源：

IEEE ELECTRON DEVICE LETTERS | 2007年 / 28卷 / 07期

基金：

美国国家科学基金会; 中国国家自然科学基金;

关键词：

ferrite; inductors; radio frequency (RF); thin film;

D O I：

10.1109/LED.2007.900299

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This letter reports the design and fabrication of on-chip radio-frequency (RF) inductors with integrated-ferrite thin films, which show substantial improvement over air-cored inductors, e.g., 19%-38% and 17%-28% increase in inductance (L) for Y2.8Bi0.2Fe5O12 and Co7ZrO9 thin-film inductors, respectively, and 32%-55% improvement in quality factor (Q) of Co7ZrO9 sample, which are all measured across 0.1-9 GM. It demonstrates the feasibility for making the ferrite-integrated high-performance compact on-chip inductors for RF ICs.

引用

页码：652 / 655

页数：4

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