An in-plane insensitive multiaperture speckle shear interferometer for slope measurement

被引:3
|
作者
Sirohi, RS [1 ]
Mohan, NK [1 ]
机构
[1] Indian Inst Technol, Dept Phys, Appl Opt Lab, Madras 600036, Tamil Nadu, India
来源
OPTICS AND LASER TECHNOLOGY | 1997年 / 29卷 / 07期
关键词
speckle metrology; multi-aperture speckle shear interferometry;
D O I
10.1016/S0030-3992(97)00027-3
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A modified two-aperture speckle shear interferometer that eliminates the contribution of the in-plane component and its derivative to the phase change, and yields a fringe pattern corresponding to the first-order partial derivatives of the out-of-plane displacement component, is reported in this note. In this method, two laterally sheared object points are viewed axially. The wave fields from these points ave independently combined at the image plane of the imaging system. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:415 / 417
页数:3
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