High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy

被引：16

作者：

Lee, Dong-Ryoung ^{[1
]}

Kim, Young-Duk ^{[1
]}

Gweon, Dae-Gab ^{[1
]}

Yoo, Hongki ^{[2
]}

机构：

[1] Korea Adv Inst Sci & Technol, Nano Optomech Lab, Dept Mech Engn, Taejon 305701, South Korea

[2] Hanyang Univ, Dept Biomed Engn, Seoul 133791, South Korea

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2014年 / 25卷 / 12期

基金：

新加坡国家研究基金会;

关键词：

confocal microscopy; 3D microscopy; fast imaging;

D O I：

10.1088/0957-0233/25/12/125403

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We propose dual-detection confocal reflectance microscopy (DDCRM) for high-speed 3D surface profiling. In comparison with conventional confocal microscopy, DDCRM can realize surface profiling without axial scanning. DDCRM is composed of two point detectors, each with a pinhole of different size. The ratio of the axial response curves measured by the two detectors provides the relationship between the axial position of the sample and the ratio of the intensity signals. Furthermore, DDCRM has a normalizing effect which allows this method to accurately measure the height of samples with various reflectance characteristics.

引用

页数：6

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