A novel approach for precise measurement of angular displacement based on attenuated total reflectance

被引：0
|
作者：
Chen, F [1 ]
Cao, ZQ [1 ]
Shen, QS [1 ]
Gu, JH [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Dept Phys, Shanghai 200240, Peoples R China
来源：
OPTOMECHATRONIC SENSORS, ACTUATORS, AND CONTROL | 2004年 / 5602卷
关键词：
planar optical waveguide; attenuated total reflectance; angular displacement; precise measurement;
D O I：
10.1117/12.581890
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A simple method for the measurement of angular displacement is proposed. As a laser beam is incident on a planar optical waveguide, the m-lines will be obtained by scanning the angle of incidence. It is found that the m-lines will shift with the variation of the thickness of the guided layer. And interesting measurement approaches which are based on intensity measurement and angle interrogation, respectively, are described. Theoretical results and simulation show that intensity measurement is more sensitive than angle interrogation. And small angle of incidence is more sensitive than large angle of incidence which corresponds to high-order modes and low-order modes, respectively.
引用
收藏
页码：253 / 264
页数：12
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