Preparation and properties of indium tin oxide films deposited on polyester substrates by reactive evaporation

被引：30
|
作者：
Ma, J [1 ]
Li, SY [1 ]
Zhao, JQ [1 ]
Ma, HL [1 ]
机构：
[1] Shandong Univ, Inst Optoelect Mat & Devices, Jinan 250100, Peoples R China
来源：
THIN SOLID FILMS | 1997年 / 307卷 / 1-2期
关键词：
indium tin oxide; polyester substrate; reactive evaporation;
D O I：
10.1016/S0040-6090(97)00203-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Highly transparent conducting indium tin oxide (ITO) films have been prepared on polyester thin film substrate by reactively evaporating metal Ln-Sn alloy in a system with an oxygen partial pressure of (3-30) X 10(-5) Torr and substrate temperatures between 80 and 240 degrees C. The structure and opto-electrical properties of the films depending on the deposition conditions have been investigated. High quality films with a average transparency of 83% and the resistivity of 7 X 10(-5) Ohm cm have been obtained by controlling the deposition parameters. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：200 / 202
页数：3
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