Structural and Sensing Properties of Sol-Gel Synthesized Ce2(Zr1-xTix)Oy Sensing Films for pH Sensors

被引：6
|
作者：
Bag, Sankar Prasad [1 ]
Lou, Bih-Show [2 ,3 ]
Her, Jim-Long [4 ]
Pang, See-Tong [5 ]
Pan, Tung-Ming [1 ,5 ]
机构：
[1] Chang Gung Univ, Dept Elect Engn, Taoyuan 33302, Taiwan
[2] Chang Gung Univ, Ctr Gen Educ, Chem Div, Taoyuan 33302, Taiwan
[3] Chang Gung Mem Hosp, Dept Nucl Med & Mol Imaging Ctr, Taoyuan 33305, Taiwan
[4] Chang Gung Univ, Div Nat Sci, Ctr Gen Educ, Taoyuan 33302, Taiwan
[5] Chang Gung Mem Hosp, Div Urol, Taoyuan 33305, Taiwan
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 2017年 / 64卷 / 09期
关键词：
Ce-2(Zr1-xTix)O-y (CZT); electrolyte-insulator-semiconductor (EIS); pH sensor; sol-gel method; MEMBRANE; SENSITIVITY; ZR; TI;
D O I：
10.1109/TED.2017.2731341
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this brief, the structural properties and sensing characteristics of spin-coated Ce-2(Zr1-xTix)O-y (CZT) sensing film were investigated for electrolyte-insulator-semiconductor(EIS) pH sensors. A higher pH sensitivity of 64.42 mV/pH, a lower hysteresis voltage of 1.1 mV, and a smaller drift rate of 0.36 mV/h were achieved in the CZT-embedded EIS sensors at Zr/Ti = 53/47 stoichiometry. The higher sensing behavior in CZT is attributed to the good crystallization and higher surface roughness of the film.
引用
收藏
页码：3971 / 3975
页数：5
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