Structural and Sensing Properties of Sol-Gel Synthesized Ce2(Zr1-xTix)Oy Sensing Films for pH Sensors

被引：6

作者：

Bag, Sankar Prasad ^{[1
]}

Lou, Bih-Show ^{[2
,3
]}

Her, Jim-Long ^{[4
]}

Pang, See-Tong ^{[5
]}

Pan, Tung-Ming ^{[1
,5
]}

机构：

[1] Chang Gung Univ, Dept Elect Engn, Taoyuan 33302, Taiwan

[2] Chang Gung Univ, Ctr Gen Educ, Chem Div, Taoyuan 33302, Taiwan

[3] Chang Gung Mem Hosp, Dept Nucl Med & Mol Imaging Ctr, Taoyuan 33305, Taiwan

[4] Chang Gung Univ, Div Nat Sci, Ctr Gen Educ, Taoyuan 33302, Taiwan

[5] Chang Gung Mem Hosp, Div Urol, Taoyuan 33305, Taiwan

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2017年 / 64卷 / 09期

关键词：

Ce-2(Zr1-xTix)O-y (CZT); electrolyte-insulator-semiconductor (EIS); pH sensor; sol-gel method; MEMBRANE; SENSITIVITY; ZR; TI;

D O I：

10.1109/TED.2017.2731341

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this brief, the structural properties and sensing characteristics of spin-coated Ce-2(Zr1-xTix)O-y (CZT) sensing film were investigated for electrolyte-insulator-semiconductor(EIS) pH sensors. A higher pH sensitivity of 64.42 mV/pH, a lower hysteresis voltage of 1.1 mV, and a smaller drift rate of 0.36 mV/h were achieved in the CZT-embedded EIS sensors at Zr/Ti = 53/47 stoichiometry. The higher sensing behavior in CZT is attributed to the good crystallization and higher surface roughness of the film.

引用

页码：3971 / 3975

页数：5

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