LITHIUM NIOBATE THIN FILM BASED A3 MODE RESONATORS WITH HIGH EFFECTIVE COUPLING COEFFICIENT OF 6.72%

被引：10

作者：

Zhang, Yi ^{[1
]}

Wang, Liang ^{[2
]}

Zou, Yang ^{[1
]}

Xu, Qinwen ^{[1
]}

Liu, Jieyu ^{[1
]}

Wang, Qing ^{[2
]}

Tovstopyat, Alexander ^{[1
]}

Liu, Wenjuan ^{[1
]}

Sun, Chengliang ^{[1
]}

Yu, Hongyu ^{[2
,3
,4
]}

机构：

[1] Wuhan Univ, Inst Technol Sci, Wuhan, Peoples R China

[2] Southern Univ Sci & Technol, Sch Microelect, Shenzhen, Peoples R China

[3] Shenzhen Inst Wide Bandgap Semicond, Shenzhen, Peoples R China

[4] Minist Educ, Engn Res Ctr Integrated Circuits Next Generat Com, Shenzhen, Peoples R China

来源：

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) | 2021年

基金：

中国国家自然科学基金;

关键词：

Lithium Niobate; A3; mode; Lamb wave; X-band; coupling coefficient; SAW;

D O I：

10.1109/MEMS51782.2021.9375462

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, 600nm Z-cut lithium niobate (LiNbO3) thin film based third-order antisymmetric (A3) mode resonators with different geometries has been investigated. Through a series of experiments, it has been found for the first time that effective electromechanical coupling coefficient (K-eff(2)) is influenced by the gap between electrodes (Ge), and K-eff(2) decreases with the increase of Ge when electrode pitch (P) higher than Sum. Finally, a A3 mode resonator with a high K-eff(2) of 6.72% is obtained. This K-eff(2) is the highest reported value in similar acoustic resonators working about 9 GHz and will be beneficial to the construction of X-band filters.

引用

页码：466 / 469

页数：4

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