A new model for the field dependence of intrinsic and extrinsic time-dependent dielectric breakdown

The field acceleration of intrinsic and extrinsic breakdown is studied. For the intrinsic mode an exp (1/E)- acceleration law is found, while for the extrinsic mode an new exp (E)-acceleration law for Q(BD) is proposed. This field acceleration model is implemented in a maximum likelihood algorithm together with a new analytical expression for fitting competing Weibull distributions. With this algorithm an extensive T-BD-data set measured at different stress conditions can be fitted excellently in one single calculation. From the result, predictions of low-field oxide reliability are made and the screening conditions in order to guarantee a pre-set reliability specification are calculated.