A study on the effect of structure and P-doping of Si thin film as an anode for lithium rechargeable batteries

被引：14
|
作者：
Song, Jin O. [1 ,2 ]
Shim, Heung Taek [1 ]
Byun, Dong Jin [2 ]
Lee, Joong Kee [1 ]
机构：
[1] Korea Inst Sci & Technol, Battery Res Ctr 2, POB 131, Seoul 130650, South Korea
[2] Korea Univ, Dept Mat Sci & Engn, Seoul 136701, South Korea
来源：
ADVANCES IN NANOMATERIALS AND PROCESSING, PTS 1 AND 2 | 2007年 / 124-126卷
关键词：
lithium rechargeable battery; silicon thin film; anode; PH3; CVD;
D O I：
10.4028/www.scientific.net/SSP.124-126.1063
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Effects of substrate temperature and phosphor doping on electrochemical characteristics of the silicon film anode were investigated. The silicon thin films were synthesized directly on copper foil by radio-frequency capacitively coupled plasma-enhanced chemical-vapor deposition (r.f.-CVD). The cyclability of the silicon anode greatly depends on the surface morphology and surface resistivity. The silicon film anodes which have granular structure and high conductivity showed higher cyclability than those of planer and low conductivity, respectively.
引用
收藏
页码：1063 / +
页数：2
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