Study of microstructure and gas sensing properties of tin oxide thin films prepared by metal organic chemical vapor deposition

被引：0
|
作者：
Lee, SW [1 ]
Liu, DH [1 ]
Tsai, PP [1 ]
Chen, H [1 ]
机构：
[1] UNIV ILLINOIS,DEPT MAT SCI & ENGN,URBANA,IL 61801
来源：
METAL-ORGANIC CHEMICAL VAPOR DEPOSITION OF ELECTRONIC CERAMICS II | 1996年 / 415卷
关键词：
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：237 / 242
页数：6
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