Nanopipe fabrication using vertically aligned carbon nanofiber templates

被引：13
|
作者：
Melechko, AV [1 ]
McKnight, TE
Guillorn, MA
Austin, DW
Ilic, B
Merkulov, VI
Doktycz, MJ
Lowndes, DH
Simpson, ML
机构：
[1] Oak Ridge Natl Lab, Nanoscale Technol Res Grp, Oak Ridge, TN 37831 USA
[2] Univ Tennessee, Ctr Environm Biotechnol, Knoxville, TN 37996 USA
[3] Univ Tennessee, Mat Sci & Engn Dept, Knoxville, TN 37996 USA
[4] Cornell Univ, Ithaca, NY 14853 USA
[5] Oak Ridge Natl Lab, Div Life Sci, Oak Ridge, TN 37831 USA
[6] Oak Ridge Natl Lab, Thin Film & Nanostruct Phys Grp, Oak Ridge, TN 37831 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2002年 / 20卷 / 06期
关键词：
D O I：
10.1116/1.1515306
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report a method to fabricate tubular nanostructures using vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition as templates. The resulting nanopipes are oriented perpendicular to the substrate and have internal diameters ranging from 30 to 200 nm and can be up to several micrometers in length. These nanopipes can be deterministically positioned on a substrate and arranged into singular devices or arrays. (C) 2002 American Vacuum Society.
引用
收藏
页码：2730 / 2733
页数：4
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