Fabrication of nanopipes using vertically aligned carbon nanofiber templates and their properties

被引：0
|
作者：
Melechko, AV [1 ]
McKnight, TE [1 ]
Guillorn, MA [1 ]
Ilic, B [1 ]
Merkulov, VI [1 ]
Doktycz, MJ [1 ]
Warmac, B [1 ]
McCorkle, W [1 ]
Lowndes, DH [1 ]
Simpson, ML [1 ]
机构：
[1] Oak Ridge Natl Lab, Mol Scale Engn & Nanoscale Technol Res Grp, Oak Ridge, TN 37831 USA
来源：
NANOTECH 2003, VOL 3 | 2003年
关键词：
nanofluidics; porous membrane; carbon nanofibers; microfabrication;
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A method to fabricate nanoscale structures suitable for fluidic transport is reported. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to several micrometers that are oriented perpendicular to the substrate. This method provides a high level of control over the nanopipe location, number, length, and diameter, permitting them to be deterministically positioned on a substrate and arranged into arrays.
引用
收藏
页码：416 / 419
页数：4
相关论文
共 50 条
  • [1] Nanopipe fabrication using vertically aligned carbon nanofiber templates
    Melechko, AV
    McKnight, TE
    Guillorn, MA
    Austin, DW
    Ilic, B
    Merkulov, VI
    Doktycz, MJ
    Lowndes, DH
    Simpson, ML
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06): : 2730 - 2733
  • [2] Fabrication and characterization of vertically aligned carbon nanofiber electrodes for biosensing applications
    Baker, SE
    Tse, KY
    Lee, CS
    Hamers, RJ
    DIAMOND AND RELATED MATERIALS, 2006, 15 (2-3) : 433 - 439
  • [3] Fabrication and Field Emission Properties of vertically aligned Carbon Nanotubes
    Bonnassieux, Y.
    Cojocaru, C. S.
    Dhar, A.
    Legagneux, P.
    IDW'10: PROCEEDINGS OF THE 17TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2010, : 1561 - 1563
  • [4] Fabrication of gated cathode structures using an in situ grown vertically aligned carbon nanofiber as a field emission element
    Guillorn, MA
    Simpson, ML
    Bordonaro, GJ
    Merkulov, VI
    Baylor, LR
    Lowndes, DH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (02): : 573 - 578
  • [5] Detection of alcohol with Vertically Aligned Carbon Nanofiber (VACNF)
    Weeks, Martha L.
    Frymier, Paul D.
    Rahman, Touhidur
    Islam, Syed K.
    McKnight, Timothy E.
    2007 IEEE SENSORS, VOLS 1-3, 2007, : 675 - 677
  • [6] Thermal interface properties of Cu-filled vertically aligned carbon nanofiber arrays
    Ngo, Q
    Cruden, BA
    Cassell, AM
    Sims, G
    Meyyappan, M
    Li, J
    Yang, CY
    NANO LETTERS, 2004, 4 (12) : 2403 - 2407
  • [7] Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures
    Melechko, AV
    McKnight, TE
    Guillorn, MA
    Merkulov, VI
    Ilic, B
    Doktycz, MJ
    Lowndes, DH
    Simpson, ML
    APPLIED PHYSICS LETTERS, 2003, 82 (06) : 976 - 978
  • [8] Magnetic nanostructures grown on vertically aligned carbon nanotube templates
    Wu, YH
    Qiao, PW
    Qiu, JJ
    Chong, TH
    Low, TS
    NANO LETTERS, 2002, 2 (02) : 161 - 164
  • [9] Design, fabrication and characterization of double-gated vertically aligned carbon nanofiber field emitter arrays
    Chen, L. -Y.
    Velasquez-Garcia, L. F.
    Wang, X.
    Cheung, K.
    Teo, K.
    Akinwande, A. I.
    2007 IEEE 20TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE, 2007, : 74 - +
  • [10] Effect of Synthesis Conditions on the Structure and Electrochemical Properties of Vertically Aligned Graphene/Carbon Nanofiber Hybrids
    Khosravifar, Mahnoosh
    Dasgupta, Kinshuk
    Shanov, Vesselin
    C-JOURNAL OF CARBON RESEARCH, 2024, 10 (04):
12345