Quantitative imaging of sheet resistance with a scanning near-field microwave microscope

被引：97
|
作者：
Steinhauer, DE [1 ]
Vlahacos, CP [1 ]
Dutta, SK [1 ]
Feenstra, BJ [1 ]
Wellstood, FC [1 ]
Anlage, SM [1 ]
机构：
[1] Univ Maryland, Ctr Superconduct Res, Dept Phys, College Pk, MD 20742 USA
来源：
APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 07期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1063/1.120918
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We describe quantitative imaging of the sheet resistance of metallic thin films by monitoring frequency shift and quality factor in a resonant scanning near-held microwave microscope. This technique allows fast acquisition of images at approximately 10 ms per pixel over a frequency range from 0.1 to 50 GHz. In its current configuration, the system can resolve changes in sheet resistance as small as 0.6 Ohm/square for 100 Ohm/square films. We demonstrate its use at 7.5 GHz by generating a quantitative sheet resistance image of a YBa2Cu3O7-delta thin film on a 5 cm diam sapphire wafer. (C) 1998 American Institute of Physics.
引用
收藏
页码：861 / 863
页数：3
相关论文
共 50 条
  • [31] Tunable resonance cavity control in a near-field scanning microwave microscope
    Hong, S
    Kim, J
    Lee, K
    Kim, JT
    Cha, D
    Lee, Y
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2002, 40 (05) : 861 - 865
  • [32] Simulations of a Dielectric Slot Tip for Scanning Near-Field Microwave Microscope
    Leidenberger, Patrick
    Schoenle, Philipp
    Hafner, Christian
    [J]. JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2011, 8 (08) : 1556 - 1563
  • [33] A scanning near-field optical microscope
    Baiburin, VB
    Volkov, YP
    Konnov, NP
    [J]. INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1998, 41 (02) : 277 - 279
  • [34] SCANNING PLASMON NEAR-FIELD MICROSCOPE
    SPECHT, M
    PEDARNIG, JD
    HECKL, WM
    HANSCH, TW
    [J]. PHYSICAL REVIEW LETTERS, 1992, 68 (04) : 476 - 479
  • [35] Near-field scanning optical microscope
    Volkov, UP
    Baibyrin, VB
    Konnov, NP
    Mironychev, AP
    Bespalova, NV
    [J]. SARATOV FALL MEETING 2002: OPTICAL TECHNOLOGIES IN BIOPHYSICS AND MEDICINE IV, 2002, 5068 : 411 - 416
  • [36] NEAR-FIELD SCANNING ACOUSTIC MICROSCOPE
    KHURIYAKUB, BT
    CINBIS, C
    CHOU, CH
    REINHOLDTSEN, PA
    [J]. IEEE 1989 ULTRASONICS SYMPOSIUM : PROCEEDINGS, VOLS 1 AND 2, 1989, : 805 - 807
  • [37] The near-field scanning thermal microscope
    Wischnath, Uli F.
    Welker, Joachim
    Munzel, Marco
    Kittel, Achim
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 79 (07):
  • [38] Quantitative Error Analysis in Near-Field Scanning Microwave Microscopy
    Haddadi, Kamel
    Polovodov, Petr
    Theron, Didier
    Dambrine, Gilles
    [J]. 2018 INTERNATIONAL CONFERENCE ON MANIPULATION, AUTOMATION AND ROBOTICS AT SMALL SCALES (MARSS), 2018,
  • [39] Local microwave characterization of metal films using a scanning microwave near-field microscope
    Liu, L
    Feng, YJ
    Wu, LY
    Liu, QG
    Zhao, EH
    Fu, ZL
    Kang, L
    Yang, SZ
    Wu, PH
    [J]. SOLID STATE COMMUNICATIONS, 2001, 119 (03) : 133 - 135
  • [40] Near-Field Microwave Imaging Based on Planar Aperture Scanning
    Amineh, Reza K.
    Ravan, Maryam
    Trehan, Aastha
    Nikolova, Natalia K.
    [J]. 2010 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST (MTT), 2010, : 760 - 763
12345