Effects of high DC bias voltage on the properties of diamond-like carbon films

被引：0
|
作者：
Yang, Boqian [1 ]
Zhang, Hongxin [1 ]
Wang, Xinpeng [1 ]
Feng, Xianping [1 ]
机构：
[1] Univ Puerto Rico, Dept Phys, San Juan, PR 00931 USA
来源：
DIAMOND ELECTRONICS - FUNDAMENTALS TO APPLICATIONS | 2007年 / 956卷
关键词：
bias voltage; plasma sputtering deposition; diamond-like carbon films; Raman scattering spectra;
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Diamond-like carbon (DLC) films were synthesized using pulsed plasma sputtering deposition techniques. Microscope and Raman scattering techniques were used to study the effects of bias voltages on the properties of diamond-like carbon films. With d.c. bias voltage up to 1000V, the smooth and thick DLC films together with a few nanoparticles were obtained. An increase of the d.c. bias voltage up to 2000V yielded thicker DLC films but the surface of films became slightly rough and size of particles became large. The crystalline properties of these particles were studied.
引用
收藏
页码：267 / +
页数：2
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