Nano-fabrication: A review

被引：10

作者：

Yang, Laixia

Akhatov, Iskander

Mahinfalah, Mohammed

Jang, Bor Z. ^{[1
]}

机构：

[1] Xian Univ Sci & Technol, Sch Mech Engn, Xian 710054, Peoples R China

[2] N Dakota State Univ, Dept Mech Engn & Appl Mech, Fargo, ND 58105 USA

[3] Wright State Univ, Coll Engn & Comp Sci, Dayton, OH 45435 USA

来源：

JOURNAL OF THE CHINESE INSTITUTE OF ENGINEERS | 2007年 / 30卷 / 03期

关键词：

nano-fabrication; nano-imprint; dip-pen lithography; screen printing;

D O I：

10.1080/02533839.2007.9671272

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nano-fabrication techniques that are emerging from laboratories or already on the market are reviewed. These techniques include electron beam or X-ray lithography, soft lithography, micro- or nano-stencil guided deposition, dip-pen or fountain-pen lithography, nano-xerography, scanning nano-lithography, and nano-imprint lithography. The advantages and shortcomings of selected nano-fabrication techniques are highlighted. The possibility of extending highly versatile liquid droplet techniques down to nanometer scales is also critically evaluated. Finally, the authors' perspectives on fruitful future research directions are presented.

引用

页码：441 / 446

页数：6

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