Nano-fabrication: A review

Nano-fabrication techniques that are emerging from laboratories or already on the market are reviewed. These techniques include electron beam or X-ray lithography, soft lithography, micro- or nano-stencil guided deposition, dip-pen or fountain-pen lithography, nano-xerography, scanning nano-lithography, and nano-imprint lithography. The advantages and shortcomings of selected nano-fabrication techniques are highlighted. The possibility of extending highly versatile liquid droplet techniques down to nanometer scales is also critically evaluated. Finally, the authors' perspectives on fruitful future research directions are presented.